AE 31512411-362 DC power module

AE 31512411-362 DC power module 

 Introduction

AE 31512411-362 DC power module, a high-power DC power supply unit dedicated to semiconductor magnetron sputtering equipment, with stable output and suitable for plasma thin film technology.

Product Features:

1. Closed loop voltage and current control, low output ripple, ensuring the repeatability of plasma process

2. It has multiple protections including overvoltage, overcurrent, overheating, and arc suppression to protect the target material and cavity

3. Support remote analog signal control and can be connected to the device host to adjust power parameters

4. Rack mounted modular structure, easy disassembly and replacement, reduces equipment downtime

5. Anti RF interference, able to operate stably in strong electromagnetic semiconductor cabinet environments

Product Parameters:

1. Equipment type: Semiconductor process DC power module

2. Supports dual mode output of constant voltage and constant current

3. Rapid detection and suppression function of charged arc

4. Simulate IO communication interface, support external settings and status feedback

5. Working temperature: 5-50 ℃, cabinet rack installation

Application fields:

1. Power supply for target material of magnetron sputtering PVD coating equipment

2. Power supply for semiconductor metal thin film deposition process

3. DC source for vacuum plasma surface treatment equipment

4. Thin film coating industrial vacuum process equipment

5. DC power supply unit for semiconductor equipment cavity matching

Excellent arc suppression and process output stability make AE 31512411-362 the core power supply component for PVD thin film processes.

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