AMAT Applied Materials 5000-170 Valve Controller

AMAT Applied Materials 5000-170 Valve Controller

Product Details Introduction

1. Adaptation scenarios and functions (5000-170)

Equipment adaptation: Match AMAT semiconductor vacuum chambers (such as etching and deposition equipment), control pneumatic/electric vacuum valves, and adapt to mainstream valve types such as Gate Valve and Butterfly Valve.

Process compatibility: Focus on precise control of valves in vacuum environments, adapt to processes such as vacuum pumping and gas switching in wafer manufacturing, and support the use of 1 × 10 ⁻³ -1 × 10 ⁻⁹ Pa vacuum intervals.

Core function: Implement closed-loop control of valve opening/adjustment, cooperate with the equipment main control system to complete pressure regulation and gas flow control, and ensure process stability.

2. Accuracy and performance (5000-170)

Control accuracy: Valve opening adjustment accuracy ± 1%, switch response time ≤ 100ms, pressure control deviation ≤ 0.5% FS, suitable for the strict requirements of 3x nanometer process on vacuum environment.

Signal compatibility: Supports 4-20mA analog and RS-485 digital signal input/output, can be connected to AMAT equipment PLC system, and achieve remote monitoring and parameter adjustment.

Stable operation: Built in PID regulation algorithm, automatically compensates for the impact of temperature and pressure fluctuations on valve control, continuous operation without drift, and an average time between failures (MTBF) of over 5000 hours.

3. Structure and Protection (5000-170)

Protection design: The shell protection level is IP65, which prevents dust and workshop cleaning splashes; The circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection to adapt to the electromagnetic environment of semiconductor workshops.

Installation adaptation: Compact structure (size approximately 150 × 100 × 50mm), supports rail/wall mounted installation, adapts to limited space inside equipment control cabinets, and has foolproof terminal design to avoid misconnection.

Easy maintenance: The panel is equipped with an LCD display screen and buttons, which can locally view/set parameters (such as valve opening and pressure threshold), support fault code display, and quickly locate problems.

AMAT Applied Materials 5000-170  Product imag

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