AMAT Applied Materials 0100-A0019 RF Matching Detector

AMAT Applied Materials 0100-A0019 RF Matching Detector

Product Details Introduction

AMAT Applied Materials 0100-A0019 RF Matching Detector

1、 Product Overview

AMAT 0100-A0019 is a radio frequency (RF) matching detector used by Applied Materials for semiconductor devices.

The main function of this module is to monitor the impedance matching status between the RF generator and the process chamber, and ensure efficient and safe transmission of RF energy to the plasma chamber by detecting reflected power and load changes.

RF matching detectors are typically used in conjunction with RF generators (such as 0090-01419) and matching networks, and are key sensing and control components in plasma process equipment such as PVD, CVD, and Etch.

2、 Product Features

Impedance matching monitoring

Real time detection of cavity load impedance and matching network status.

Determine whether the transmission power matches the cavity load to avoid energy reflection.

Reflection power detection

Measure RF reflection power to prevent RF energy from flowing back into the generator and protect the equipment.

Output signals to the control system to achieve automatic matching or alarm triggering.

Process optimization

Provide matching status feedback to assist in automatic adjustment of RF generators and matching networks.

Ensure plasma stability, improve process consistency and productivity.

Security protection function

Built in overvoltage and overcurrent detection interfaces.

Trigger the protection mechanism when the reflected power is too high or the matching is abnormal to prevent equipment damage.

AMAT Applied Materials 0100-A0019 Product imag

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