AMAT Applied Materials 903172-001 Input/Output Module
Product Details Introduction
Product Overview
AMAT Applied Materials 903172-001 Input/Output Module (Liquid Source I/O PCB/I Board) is a specialized circuit board used for liquid supply and management subsystems in semiconductor process equipment. This module is responsible for signal acquisition, drive output, and interface communication with the main control system of liquid source related sensors and actuators. It is a key electronic unit for liquid source control and monitoring circuits.
Technical characteristics (speculation)
I/O type mixing: usually includes digital input/output and analog input/output channels, used to collect analog quantities such as flow rate, pressure, liquid level, as well as read digital quantities such as valve position and limit, and drive actuators such as valves or pumps.
Signal conditioning and isolation: equipped with signal buffering, filtering, and isolation circuits to ensure reliable transmission of weak signals in noisy environments and protect the main control.
Drive capability: The output end has a drive stage (open collector electrode, relay drive or low-power driver), which can directly control small actuators on site or control larger loads through intermediate relays.
Bus/Backplane Interface: Equipped with standard plug/backplane interfaces for connecting to the device's main control unit, used for data and power transmission, compatible with the internal communication structure of the device.
Diagnosis and status indication: may include self check, fault indication, and LED status indication for rapid on-site fault location.
Version management: There are revised versions (such as Rev B), and different revisions may have differences in component selection, interface pins, or wiring. It is necessary to confirm compatibility with the main control/chassis.
Industrial grade reliability: The selection of components and PCB process meet the high reliability and long-term operation requirements of semiconductor equipment, taking into account anti-interference and temperature stability.
Application scenarios
Sensing and driving of the chemicals/liquid delivery control subsystem.
Control and monitor chemical transfer pumps, proportional valves, solenoid valves, flow meters, pressure sensors, and level switches.
Equipment that requires precise management of liquid ratio and supply in semiconductor etching, deposition, or cleaning processes.
Cooperate with the machine control board or vacuum/gas management chassis as the on-site interface card for the equipment liquid circuit.
AMAT Applied Materials 9090-00962 Product imag

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