AMAT Applied Materials C190238 Pressure Sensor

AMAT Applied Materials C190238 Pressure Sensor

Product Details Introduction

Product Overview

AMAT C190238 is a pressure sensor used in Applied Materials semiconductor equipment.

This sensor is mainly used for real-time monitoring of vacuum chamber or process gas pressure, providing key feedback signals for process control systems to ensure the stability and accuracy of semiconductor manufacturing processes.

Technical parameters (inferred based on AMAT pressure sensor characteristics)

Type: Pressure Sensor/Pressure Transmitter.

Measurement range: Suitable for the vacuum to low pressure range required for semiconductor processes, such as Torr to atmospheric pressure.

Output signal: Analog signal (0-10 V or 4-20 mA) or digital signal interface for the control system to read.

Interface method: flange or threaded interface, convenient for installation in chambers or pipelines.

Installation location: Process chamber, transmission chamber, or gas branch pipeline.

Features: High precision, high repeatability, fast response, suitable for semiconductor clean environment and corrosion resistance requirements.

Application scenarios

Vacuum chamber pressure monitoring

Real time pressure detection in deposition (CVD, PVD), etching (Etch), or cleaning chambers.

Monitoring and control of pneumatic system

Collaborate with a Mass Flow Controller (MFC) and valves to achieve closed-loop pressure control.

Process stability guarantee

Adjust the pump and valve operation based on sensor feedback to ensure that the process pressure remains within the set range.

Safety interlock

When the pressure exceeds the safe range, the system interlock protection is triggered to avoid equipment damage or process abnormalities.

AMAT Applied Materials C190238  Product imag

AMAT Applied Materials C190238  Related website links

140CPU65260 processor module
369-HI-0-M-0-0 Relay module
369-HI-0-M-0-0-0-E Relay module

Other website links

ABB TU846 终端单元
ABB PHARPS32000000 F8G2B3B6 电源模块
ABB SM810K01 3BSE030928R1  CPU处理器模块