AMAT Applied Materials 0010-90811 Controller Module

AMAT Applied Materials 0010-90811 Controller Module

Product Details Introduction

Product Overview

The AMAT 0010-90811 controller module is a key component in Applied Materials semiconductor manufacturing equipment, mainly used for gas supply and process control systems. This module ensures that the chamber environment meets process requirements through precise adjustment of gas flow rate, pressure, and valve status. It is widely used in core processes such as etching, deposition, and ion implantation, playing an important role in ensuring consistency and high yield in semiconductor manufacturing.

Technical parameters (inferential information, specific values may vary slightly due to undisclosed information)

Function type: Gas controller module

Control object: Process gases (such as BF ∝, high-purity process gases, etc.)

Input power supply: usually low voltage DC power supply (24V DC is common)

Signal interface: supports communication with the upper system controller (PLC or AMAT dedicated main control system)

Monitoring function: pressure, valve status, flow feedback

Control mode: closed-loop control, supporting fast response and high-precision adjustment

Design features: resistant to high-purity gas corrosion, adaptable to clean room vacuum process environment

Application scenarios

Semiconductor process gas supply

Accurately adjust the process gas flow rate for CVD, PVD, etching, ion implantation and other processes.

Vacuum chamber environment control

Adjust the gas pressure and proportion in the vacuum process chamber to ensure the stable operation of the process.

Security and protection

Provide gas status monitoring (flow rate, pressure, valve position) and trigger protective measures in case of abnormal situations.

Process accuracy and consistency

Implement closed-loop feedback, maintain stable gas parameters, and ensure consistent wafer processing quality.

AMAT Applied Materials 0010-90811 Controller Module  Product imag

AMAT Applied Materials 0010-90811 Controller Module  Related website links

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Other website links

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