AMAT 0010-70162 Controller

AMAT  0010-70162 Controller

Product Details Introduction

AMAT 0010-70162 Controller

Product Overview

The AMAT (Applied Materials) 0010-70162 controller is a specialized control module used in semiconductor manufacturing equipment, mainly responsible for monitoring equipment operating parameters, processing execution logic, and coordinating control tasks of peripheral components. This controller plays the role of the "brain" in AMAT's deposition, etching, ion implantation and other process equipment, achieving precise control and safety management of the process through high-speed signal processing and logical judgment.

Technical parameters (typical direction, specific parameters need to refer to the original factory documentation)

Control logic: Supports multitasking parallel processing and has real-time process control capability

Interface type: Supports multiple analog/digital I/O interfaces and bus interfaces, facilitating communication with sensors, actuators, and upper computers

Processing performance: Industrial grade embedded processor, suitable for long-term high load operation

Security mechanism: Built in fault detection and interlock protection logic

Adaptability: Customized for AMAT semiconductor process equipment platform

Application scenarios

Sedimentation equipment control

Used in CVD, PVD, ALD and other process equipment to manage key parameters such as chamber temperature, gas flow rate, plasma power, etc.

Ensure the uniformity and repeatability of thin film deposition.

Etching system

Monitor and adjust the gas ratio, vacuum degree, and RF power of the reaction chamber to ensure etching rate and contour accuracy.

Realize real-time feedback and rapid correction of parameters in etching process.

Ion implantation equipment

Control the beam energy, angle, and scanning process to ensure the uniformity of ion implantation and stable device characteristics.

Process gas and vacuum system

As the centralized control core of execution units such as gas panels, vacuum pumps, valves, etc., it coordinates the operation logic.

Factory automation and interlocking protection

In the wafer fab automation environment, the controller can communicate with the central monitoring system to perform interlocking and linkage protection.

To avoid production interruptions caused by process abnormalities or hardware failures.

Research and laboratory applications

Used for new process development and experimental platform, supporting the adjustment and recording of multivariate experimental parameters.

AMAT  0010-70162 Controller  Product imag

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