AMAT 0010-09301 Throttle Valve Component

AMAT 0010-09301 Throttle Valve Component

Product Details Introduction

AMAT 0010-09301 Throttle Valve Component

Product Overview

AMAT (Applied Materials) 0010-09301 throttle valve assembly is a gas or liquid flow control module used in semiconductor manufacturing equipment. By adjusting the valve opening, precise control of fluid flow or pressure can be achieved to ensure stable internal process parameters of the equipment, such as chamber pressure, gas flow rate, or liquid cooling flow rate. This component is widely used in deposition, etching, and pneumatic systems, and is an important execution unit for achieving process accuracy and equipment safety.

Technical parameters (typical direction, specific data should refer to the original factory information)

Control mode: manual or automatic drive, adjustable through pneumatic/electronic signals

Applicable medium: process gas, coolant or inert gas

Flow range: Designed according to process requirements, can achieve fine tuning control

Pressure range: Suitable for the working pressure of equipment process chambers or pipelines

Interface: Compatible with AMAT system pipelines and control interfaces

Environmental adaptability: cleanroom compatibility, corrosion resistance, and high temperature resistance

Installation method: Modular installation, easy to integrate and maintain

Application scenarios

Deposition process (CVD/PVD/ALD)

Accurately control the gas flow rate or pressure in the reaction chamber

Ensure the uniformity of thin film deposition and process repeatability

Etching process equipment

Adjust the gas flow rate or pressure in the etching chamber to maintain etching accuracy

Collaborate with RF power modules and sensors

Cooling and Pneumatic System

Control the flow of coolant or auxiliary gas

Protect electronic modules or cavity components from overvoltage or overcurrent

Equipment maintenance and debugging

Provide adjustable valve control for easy process parameter tuning and equipment maintenance

AMAT 0010-38838 AC Distributor  Product imag

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