AMAT 0100-01341 power module
Product Details Introduction
AMAT 0100-01341 power module
Product Overview
The AMAT (Applied Materials) 0100-01341 power module is a critical electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various functional modules inside the equipment. It is usually integrated into the control box, chassis control box, or independent power cabinet, providing power to key sub modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation and process accuracy.
Technical parameters (typical direction, specific data should refer to the original factory information)
Input power supply: Industrial standard AC power supply
Output type: DC/AC power output, multiple adjustable channels
Rated power: meets the requirements of high-power process modules
Protection function: overcurrent, overvoltage, short circuit protection
Interface: Connect with the control system and interlock system to achieve remote monitoring
Installation method: Modular design for easy integration, maintenance, and replacement
Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment
Application scenarios
Controller and chassis control box power supply
Provide stable power supply to the controller PCB、 Interlocking module
Ensure the normal operation of internal electronic modules
Deposition process (CVD/PVD/ALD)
Provide high-precision power supply for heaters, pumps, and gas valves
Support temperature and flow control during thin film deposition process
Etching process equipment
Power supply for RF module, pressure sensor, and flow control module
Ensure stable etching power and gas control
Ion implantation system
Provide power for ion source, scanning system, and beam monitoring module
Ensure consistent injection dose and uniformity
Factory Automation and Safety Systems
Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection
Improve operational safety and process continuity
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