Kawasaki 30D60E-A331 Robot Controller

Kawasaki 30D60E-A331 Robot Controller 

 Introduction

Kawasaki 30D60E-A331 is a semiconductor cleanroom wafer handling robot controller that is compatible with Kawasaki NT series wafer manipulators, achieving high-precision wafer transfer control in clean environments.

Product Features:

1. Fully digital servo control, smooth motion trajectory, low handling vibration

2. Built in soft collision detection effectively protects the wafer from breakage

3. Compatible with SEMI communication standards and able to interface with production line upper computer systems

4. On board fault self diagnosis, quickly locate abnormal operation of the robotic arm

5. Compact cabinet design, suitable for narrow installation space inside the machine

Product Parameters:

1. Number of control axes: 4 axes

2. Communication interface: Ethernet, dedicated device bus

3. Working power supply: AC200-230V 50/60Hz

4. Working temperature: 5-45 ℃

5. Repetitive positioning accuracy: ± 0.04mm

Application fields:

1. Motion control of EFEM equipment wafer manipulator

2. Semiconductor machine atmospheric end wafer loading and unloading

3. Robot arm drive for wafer cleaning equipment

4. Control of wafer inspection equipment transmission unit

5. Kawasaki Semiconductor Robot Spare Parts Replacement

Kawasaki 30D60E-A331 can provide stable and high-precision wafer handling motion control for semiconductor production lines

Product imag

ontroller Module

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