AMAT 0090-76133 Single Board Computer Module

AMAT 0090-76133 Single Board Computer Module 

 Introduction

AMAT 0090-76133 is an old semiconductor process machine VME bus single board computer module (Synergy V452). As an embedded main control unit of the machine, it realizes process logic operation, data processing, and overall communication, and is compatible with Centura and Endura series equipment.

Product Features:

1. Industrial grade board components, three proof coating, anti plasma workshop electromagnetic interference

2. VME slot installation, directly connected to the machine backplane, easy to replace and disassemble

3. Built in watchdog mechanism, automatic alarm for abnormalities, ensuring the safe operation of the machine

4. Supports SECS/GEM protocol and can be connected to the upper computer of the production line to complete formula interaction

5. Real time processing of chamber sensor data to achieve closed-loop control of etching and deposition processes

Product Parameters:

1. Processor: Motorola 68040

2. Bus: VMEbus

3. Memory: 16MB (expandable to 32MB)

4. Communication interface: Ethernet, RS-232

5. Working temperature: 5-45 ℃

Application fields:

1. AMAT Centura etching equipment main control operation unit

2. Endura PVD thin film deposition machine system control

3. Storage of semiconductor process formulas and chamber logic processing

4. Signal acquisition and analysis of vacuum equipment sensors

5. Replacement of old semiconductor equipment spare parts with application materials

AMAT 0090-76133 can provide stable and reliable embedded main control computing capabilities for semiconductor legacy process machines

Product imag

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