Pearl Kogyo RP-5000-60MA RF Generator

Pearl Kogyo RP-5000-60MA RF Generator 

 Introduction

Pearl Kogyo RP-500-60MA RF generator, semiconductor plasma RF power supply unit.

Product Features:

1. All solid state RF closed-loop output with high power regulation accuracy

2. Rapid arc suppression to cope with chamber ignition impact

3. Low reflectivity tolerance, stable operation under load fluctuations

4. View operating parameters and fault codes on the local panel

5. Support remote control of PLC through analog and digital interfaces

6. Rack mounted structure, easy to disassemble, replace and maintain

7. Air cooling and heat dissipation, suitable for 7 × 24-hour operation of production lines

8. Real time feedback of power status for process monitoring

9. Fault log storage for easy troubleshooting

10. Adapt to plasma loading for etching and thin film deposition

Product Parameters:

1. Rated power: 5kW

2. Operating frequency: 13.56MHz

3. Interface: Analog I/O, Digital Communication Interface

4. Protection: Over power, over-current, over temperature, reflected power protection

5. Cooling method: air-cooled

Pearl Kogyo RP-500-60MA is used for semiconductor etching and PVD plasma RF power supply.

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