Genesis GHW25Z-08108 Power System

Genesis GHW25Z-08108 Power System 

 Introduction

Genesis GHW25Z-08108 RF power module, semiconductor etching 25kW RF plasma power supply.

Product Features:

1. RF closed-loop output, high power regulation accuracy

2. Built in fast arc suppression to resist chamber ignition

3. Low output ripple ensures stable plasma load

4. Local display of operating parameters and fault codes

5. Support remote control of PLC through analog and digital interfaces

6. Water cooling and heat dissipation, suitable for 7 × 24-hour production line operation

7. Real time collection of power status, supporting monitoring

8. Rack mounted structure, easy to disassemble and replace

9. Comes with fault records for easy maintenance

10. Resistant to load changes and adaptable to various plasma operating conditions

Product Parameters:

1. Rated power: 25kW

2. Output frequency: 13.56MHz

3. Interface: Analog I/O, Digital Communication Interface

4. Protection: Over power, over temperature, arc, over-current protection

5. Cooling method: Water cooling

Genesis GHW25Z-08108 is used for plasma RF power supply station in semiconductor etching equipment.

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