Nikon 4S066-593-4 amplifier module

Nikon 4S066-593-4 amplifier module 

 Introduction

Nikon 4S066-593-4 amplifier module (SPA474L, RY-RD), linear motor servo drive unit for lithography machine worktable.

Product Features:

1. Closed loop servo drive ensures nanoscale positioning of the workpiece table

2. High bandwidth to meet high-speed scanning and motion tracking requirements

3. Cabinet drawer installation, easy to plug, replace and repair

4. Real time monitoring of motor operation status

5. Adapt to the dedicated bus communication of the entire lithography machine

6. Equipped with fault detection and abnormal output alarm

7. Good heat dissipation performance, 7 × 24-hour production line operation

8. Anti interference, adapted to the electromagnetic environment of lithography machine cabinets

9. Support position deviation compensation to reduce motion errors

10. Fault code prompt for easy maintenance

Product Parameters:

1. Input power supply: 200V three-phase, 50/60Hz

2. Rated current: 7A

3. Adaptation: Nikon NSR lithography machine RY-RD motion axis

4. Interface: Device specific backplane signal interface

5. Protection: overcurrent, over temperature, and position over limit protection

Nikon 4S066-593-4 is used for precision linear motion drive of lithography machine worktable.

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