KAWASAKI 30D65K-C212 Robot Controller
Introduction
Kawasaki 30D65K-C212 robot controller, EFEM wafer manipulator servo control cabinet.
Product Features:
1. Drive Kawasaki Semiconductor wafer handling robot
2. Using AS language programming to achieve high-precision wafer transfer
3. Use a teaching pendant to debug and view parameters and fault codes
4. Built in collision detection to protect the wafer from damage
5.IO、 Ethernet interface docking with the entire PLC system
6. Rack mounted structure, easy disassembly, replacement, and maintenance
7. Store fault logs for easy troubleshooting
8. Multiple safety circuits to meet equipment safety standards
9. Anti interference, suitable for dust-free equipment cabinet environment
10. Support continuous operation of the production line 24/7
Product Parameters:
1. Drive object: Kawasaki EFEM wafer handling robot arm
2. Operation: Supports handheld teaching pendant
3. Interface: Digital IO, Ethernet communication
4. Protection: collision detection, emergency stop, position over limit protection
5. Working environment: Semiconductor equipment cabinet
Kawasaki 30D65K-C212 is used for EFEM front-end module robot motion control.
Product imag

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Other website links
DI01 可编程控制系统
BENTLY 3500/05-01-02-00 脉冲速度监测器
WOODWARD 9905-973 伺服控制器
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