Toyota R06-0402 Vacuum Drying Pump

Toyota R06-0402 Vacuum Drying Pump 

 Introduction

Toyota R06-0402 (T600HF) dry vacuum pump, semiconductor oil-free dry pump rough pumping equipment.

Product Features:

1. No oil pump body to avoid oil vapor pollution of the process chamber

2. It can be purged with gas to treat corrosive and particulate process gases

3. Non contact operation of rotor with low wear

4. Support local viewing of running parameters and fault codes

5. Switching IO, supports PLC remote start stop alarm

6. Built in gas regulator, capable of extracting condensable steam

7. Anti dust, reducing the risk of pump body jamming

8. Fault records for easy maintenance and troubleshooting

9. The whole machine has a sturdy structure and is easy to disassemble and replace

10. Adapt to the production line for continuous operation 24/7

Product Parameters:

1. Power supply: 208VAC 50/60Hz

2. Pump type: Semiconductor claw dry vacuum pump

3. Interface: Switching IO, Alarm Output

4. Protection: Over temperature, motor overload, abnormal speed protection

5. Purpose: rough vacuuming of process chambers

The Toyota R06-0402 is commonly used in vacuum roughing stations for etching and deposition equipment.

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