MKS GHG5013A-002 RF Generator

MKS GHG5013A-002 RF Generator 

 Introduction

MKS GHG5013A-002 is a solid-state RF generator for semiconductor processes, providing stable RF power output for plasma processes and suitable for etching and thin film deposition equipment.

Product Features:

1. Solid state power amplifier architecture, high output power stability, and good process repeatability

2. Strong load adaptability, able to cope with plasma dynamic impedance fluctuations

3. Built in standing wave, over temperature, over current multiple protection, fault alarm output

4. Supports digital and analog dual communication, can be connected to the machine to achieve remote program control

5. Modular structure for easy maintenance and replacement, reducing downtime for maintenance

Product Parameters:

1. Output frequency: 13.56MHz

2. Rated output power: 5000W

3. Output impedance: 50 Ω

4. Cooling method: Water cooling

5. Communication interface: DeviceNet, analog I/O

Application fields:

1. Power supply of plasma source for semiconductor etching equipment

2. PECVD thin film deposition process RF drive

3. High density plasma process chamber power supply

4. Vacuum plasma processing of MEMS devices

5. Replacement of spare parts for semiconductor process equipment

MKS GHG5013A-002 can provide reliable RF energy output for various plasma processes in semiconductors

Product imag

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