NIKON 4S066-018-1 amplifier module

NIKON 4S066-018-1 amplifier module 

 Introduction

Nikon 4S066-018-1 is a NSR lithography machine MSYF-MLCT servo power amplifier unit, used for driving precision motion mechanisms of mask and wafer stages, ensuring nanometer level positioning operation of lithography equipment.

Product Features:

1. High power servo amplification output, fast motion response, and suppression of mechanism vibration and jitter

2. Native matching Nikon lithography equipment specific communication protocol, can be directly replaced as a whole machine

3. Integrated multiple protections for overcurrent, overvoltage, overheating, and overload, with fault signal output

4. Anti strong electromagnetic interference, suitable for complex electromagnetic working conditions in lithography workshops

5. The whole machine cabinet type module is easy to disassemble and repair, reducing machine downtime

Product Parameters:

1. Drive type: high-power servo amplifier

2. Working power supply: three-phase 200-230VAC 50/60Hz

3. Signal interface: dedicated servo bus for lithography equipment

4. Working temperature: 5-42 ℃

5. Installation form: Cabinet unit installation

Application fields:

1. Nikon NSR lithography machine mask stage motion drive

2. Power output of precision positioning mechanism for silicon wafer stage

3. High precision scanning motion unit of exposure machine

4. Precision displacement mechanism control of lithography equipment

5. Replacement of spare parts for Nikon semiconductor lithography machines

Nikon 4S066-018-1 can provide stable and reliable servo power drive for the ultra precision motion mechanism of lithography machines.

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