AMAT 0190-54600 Control Unit Turbopump

AMAT 0190-54600 Control Unit Turbopump 

 Introduction

AMAT 0190-54600 is a semiconductor process machine turbo pump control unit, dedicated to driving STP series magnetic levitation turbo molecular pumps, controlling rotor speed, status monitoring, and overall machine linkage, suitable for Centura series vacuum process equipment.

Product Features:

1. Closed loop speed control, soft start stop logic, reduces rotor impact, and extends the service life of molecular pumps

2. Real time collection of speed, temperature, vibration current parameters, and complete feedback on the operating status of the machine

3. Built in multiple protections for overspeed, overheating, excessive vibration, and abnormal communication, with fault code output

4. Native matching AMAT device bus, supporting machine master control linkage start stop and alarm interaction

5. Modular unit of the whole machine, rack mounted installation, easy disassembly and replacement, shortening downtime maintenance

Product Parameters:

1. Drive object: Magnetic levitation turbo molecular pump

2. Input power supply: 200-230VAC 50/60Hz

3. Communication interface: device specific bus, analog I/O

4. Working temperature: 5-42 ℃

5. Installation method: rack mounted cabinet

Application fields:

1. AMAT etching deposition equipment turbine pump drive control

2. Control of high vacuum molecular pump system in process chamber

3. Load lock chamber vacuum unit matching

4. Vacuum system for semiconductor wafer process

5. Application Material Semiconductor Equipment Spare Parts Replacement

AMAT 0190-54600 can provide stable and reliable turbo molecular pump drive and state control for semiconductor process vacuum systems.

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