Glassman EX040P025 Constant Voltage Power Supply Module

Glassman EX040P025 Constant Voltage Power Supply Module 

 Introduction

Glassman EX040P025 is a high-voltage and constant voltage power supply module for semiconductor equipment, used for electrostatic bias supply in vacuum processes. It has the ability to automatically switch between constant voltage and constant current, with low output ripple.

Product Features:

1. High precision closed-loop voltage regulation, small output ripple, and high consistency of process output

2. Constant voltage constant current automatic cross switching, arc suppression, and protection of cavity components

3. Support local knob adjustment and remote control of external analog signals

4. Integrated overvoltage, overcurrent, overtemperature, and arcing detection, with fault alarm output

5. Rack mounted modular structure, suitable for installation and maintenance of semiconductor cabinets

Product Parameters:

1. Rated output voltage: 40kV

2. Rated output current: 25mA

3. Input power supply: 220-240VAC 50/60Hz single-phase

4. Adjustment method: local potentiometer, external 0-10V analog control

5. Cooling method: air-cooled

Application fields:

1. High voltage bias power supply for semiconductor ion implantation equipment

2. High pressure source unit of vacuum coating equipment

3. Electrostatic bias supply for plasma process chamber

4. High pressure process equipment for material surface treatment

5. Replacement of spare parts for semiconductor process equipment

Glassman EX040P025 can provide stable and controllable high-voltage DC power output for vacuum process equipment

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