AE 3152411-223 DC power module

AE 3152411-223 DC power module 

 Introduction

AE 3152411-223 is a high-power DC power module for semiconductor PVD process, used for supplying power to magnetron sputtering targets, with excellent arc extinguishing performance.

Product Features:

1. Rapid arc suppression, reducing target material arc damage, and improving thin film process yield

2. Supports multi-mode output of constant voltage, constant current, and constant power, with flexible process adjustment

3. High power conversion efficiency, capable of long-term uninterrupted continuous operation

4. Digital analog dual control interface, supporting remote monitoring and program control of the machine

5. Multiple protections against overvoltage, overcurrent, and overheating, and fault signal output

Product Parameters:

1. Rated output power: 15kW

2. Input power supply: three-phase 408VAC 50/60Hz

3. Working mode: constant voltage/constant current/constant power

4. Cooling method: air cooling

5. Communication interface: DeviceNet, analog I/O

Application fields:

1. Power supply for semiconductor magnetron sputtering PVD process

2. Target source drive for metal thin film deposition equipment

3. DC power unit for vacuum coating equipment

4. Display device coating process power supply matching

5. Replacement of spare parts for semiconductor process equipment

AE 3152411-223 can provide stable arc resistant DC power output for vacuum sputtering process

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