AE 31550102-044 Controller Module

AE 31550102-044 Controller Module 

 Introduction

AE 31550102-044 is a control module for RF power supply, responsible for power regulation, signal acquisition, and overall logic control, and is compatible with AE series semiconductor RF generation equipment.

Product Features:

1. Closed loop power regulation control ensures the stability of RF output process

2. Signal acquisition and processing, real-time feedback of operating parameters such as power and standing wave

3. Built in over temperature, over-current, and standing wave abnormal protection logic, fault signal output

4. Native matching RF host protocol, direct replacement of card slots

5. Anti electromagnetic interference, suitable for strong electromagnetic working conditions in plasma technology

Product Parameters:

1. Working power supply: DC24V

2. Signal interface: analog I/O, device specific bus

3. Working temperature: 5-45 ℃

4. Installation form: Board slot installation

5. Function: Power closed-loop control, status monitoring and alarm

Application fields:

1. Replacement of main control board for semiconductor RF generator

2. RF unit control processing of PVD sputtering equipment

3. RF power signal control for etching equipment

4. Spare parts for PECVD process RF system

5. Maintenance and replacement of RF modules in semiconductor process equipment

AE 31550102-044 can provide stable and reliable control signal processing capabilities for semiconductor RF equipment.

Product imag

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