AE 3156310-015 Semiconductor RF Generator

AE 3156310-015 Semiconductor RF Generator 

 Introduction

AE 3156310-015 is a semiconductor solid-state RF generator that provides RF power output for plasma processes and is compatible with etching and thin film deposition equipment.

Product Features:

1. Solid state power amplification, stable output power, and good process consistency

2. Load adaptive, adapted to plasma dynamic impedance changes

3. Multiple protection against standing waves, overheating, and overcurrent, with fault alarm output

4. Analog digital dual communication, supporting remote program control of the machine

5. Rack mounted compact structure, easy disassembly and maintenance

Product Parameters:

1. Output frequency: 13.56MHz

2. Rated output power: 1500W

3. Output impedance: 50 Ω

4. Cooling method: air cooling

5. Communication interface: Analog I/O, RS-232

Application fields:

1. Plasma power supply for semiconductor etching equipment

2. PECVD thin film deposition RF drive

3. Power supply for vacuum PVD process

4. MEMS plasma processing equipment

5. Replacement of spare parts for semiconductor process equipment

AE 3156310-015 can provide stable and reliable RF power output for semiconductor plasma processes

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