AE 3152412-223 DC power module

AE 3152412-223 DC power module 

 Introduction

AE 3152412-223 is a high-power DC power supply for Pinnacle series semiconductor magnetron sputtering, used for DC sputtering power supply in thin film processes, with stable output and strong arc suppression capability.

Product Features:

1. Rapid response suppression of arc, low energy storage, and reduction of target material arc damage

2. Constant power, constant voltage, and constant current multi-mode output, with a wide range of adjustable processes

3. High power factor, excellent overall conversion efficiency, and stable long-term continuous operation

4. Supports multiple industrial communication buses and can be connected to machines for programmable monitoring

5. Equipped with multiple protections for overvoltage, overcurrent, and overtemperature, with fault alarm feedback

Product Parameters:

1. Rated output power: 20kW

2. Input power supply: three-phase 408VAC 50/60Hz

3. Working mode: constant voltage/constant current/constant power

4. Cooling method: air cooling

5. Communication interface: DeviceNet, analog interface

Application fields:

1. Power supply for semiconductor magnetron sputtering thin film deposition process

2. DC target source drive for metalized coating equipment

3. Power supply unit for flat panel display coating equipment

4. Power supply for vacuum PVD process equipment

5. Replacement of spare parts for semiconductor process equipment

AE 3152412-223 can provide high-precision, arc resistant DC power output for various PVD sputtering processes

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