30D61H-A203 Wafer Handling Robot Controller

30D61H-A203 Wafer Handling Robot Controller 

 Introduction

30D61H-A203 is a specialized robot controller for semiconductor wafer handling, which achieves multi axis collaborative motion control and is compatible with cleanroom wafer handling robotic arms.

Product Features:

1. Multi axis synchronous motion control, fast positioning response, and minimal handling shaking

2. Built in collision detection protection to prevent wafer damage from collision

3. Supports SEMI device communication protocol and can interface with upper computer systems

4. Self diagnosis of fault codes, facilitating quick troubleshooting of equipment abnormalities

5. Compact module structure, suitable for narrow installation space inside the machine

Product Parameters:

1. Number of control axes: 4 axes

2. Communication interface: EtherNet/IO

3. Working power supply: DC24V

4. Working environment temperature: 5-45 ℃

5. Control repeatability accuracy: ± 0.05mm

Application fields:

1. Semiconductor EFEM equipment wafer transfer control

2. Robot arm drive control for wafer cleaning machine

3. Coating and developing equipment wafer handling unit

4. Motion control of wafer inspection equipment manipulator

5. Replacement of spare parts for semiconductor process equipment

30D61H-A203 can meet the control requirements for high-speed and safe wafer handling in semiconductor clean environments.

Product imag

ontroller Module

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