AMAT 0190-34911 Robot Controller

AMAT 0190-34911 Robot Controller 

 Introduction

AMAT 0190-34911 is a specialized controller for semiconductor equipment wafer handling robots, used for controlling the movement of robotic arms and adapting to clean production conditions of machines.

Product Features:

1. Multi axis linkage motion control, smooth and stable wafer handling trajectory

2. Built in collision detection function, effectively protecting the wafer from damage

3. Compatible with the original equipment bus protocol and can directly interface with the entire system

4. Fault self diagnosis alarm, quickly locate abnormal operation of the robot

5. Anti interference design, adapted to the complex electromagnetic environment of semiconductor workshops

Product Parameters:

1. Number of control axes: 5 axes

2. Communication interface: DeviceNet

3. Working power supply: DC24V

4. Working temperature: 5-40 ℃

5. Repetitive positioning accuracy: ± 0.04mm

Application fields:

1. Drive control of semiconductor wafer transfer robot arm

2. AMAT etching equipment wafer handling unit

3. EFEM mechanism control of thin film deposition equipment

4. Motion control of wafer inspection equipment manipulator

5. Replacement of spare parts for semiconductor process equipment

AMAT 0190-34911 can achieve high-speed and safe wafer handling control operations within semiconductor equipment.

Product imag

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