Brooks 002-7090-03 Atmospheric Wafer Robot

Brooks 002-7090-03 Atmospheric Wafer Robot 

 Introduction

Brooks 002-7090-03 is a semiconductor EFEM unit atmospheric wafer handling robot used for high-speed wafer transfer in clean environments.

Product Features:

1. Clean grade body design, low particle generation, meets the cleanliness requirements of semiconductor workshops

2. Direct drive arm structure, low operating vibration, less likely to cause wafer fragments during wafer handling

3. Equipped with soft collision detection, it can timely identify interference protection wafers

4. Support multiple types of end effectors, compatible with wafer grasping of different specifications

5. Original factory communication protocol, which can directly interface with the upper control system of the equipment

Product Parameters:

1. Working environment: atmospheric clean environment

2. Number of control axes: 4 axes

3. Repeat positioning accuracy: ± 0.05mm

4. Power supply: DC24V

5. Communication interface: DeviceNet

Application fields:

1. EFEM equipment wafer loading and unloading conveyor

2. Wafer pre alignment station handling

3. Semiconductor testing equipment wafer transfer

4. Adhesive coating and developing equipment atmospheric transmission

5. Replacement of spare parts for semiconductor process equipment

Brooks 002-7090-03 can achieve stable and reliable wafer handling operations in the atmospheric environment of semiconductor production lines

Product imag

ontroller Module

FBM214 Analog input module
EMG LID43.03 process control module
P0904HN LZS 1500-3FOX Analog output card

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