Comdel FP7526RB RF power supply

Comdel FP7526RB RF power supply 

 Introduction

Comdel FP7526RB is a specialized RF power supply for semiconductor equipment, with stable output power and suitable for plasma process conditions.

Product Features:

1. All solid state RF power amplifier with high output power stability

2. Supports simulated remote control and can be integrated with device host systems

3. Built in multiple protections, including over temperature, over power, and high standing wave alarms

4. Resist load impedance fluctuations and adapt to plasma dynamic changes

5. Water cooled cooling structure, with strong reliability for long-term continuous operation

Product Parameters:

1. Output frequency: 13.56MHz

2. Rated output power: 2500W

3. Output impedance: 50 Ω

4. Cooling method: Water cooling

5. Control mode: analog remote+local panel

Application fields:

1. Plasma excitation in semiconductor etching equipment

2. Power supply for PECVD thin film deposition process

3. RF driver for wafer processing equipment

4. Vacuum coating plasma generation unit

5. Replacement of spare parts for semiconductor process equipment

Comdel FP7526RB can meet the RF energy supply needs of various plasma processes in semiconductors

Product imag

ontroller Module

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FBM214 Analog input module

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