Kawasaki 1000-760-01 Semiconductor Robot Controller

Kawasaki 1000-760-01 Semiconductor Robot Controller 

 Introduction

Kawasaki 1000-760-01 semiconductor robot controller, dedicated servo control cabinet for wafer handling manipulator.

Product Features:

1. Fully digital servo control, driving Kawasaki Semiconductor wafer handling robot

2. Optimization of motion trajectory algorithm to ensure high-precision positioning of wafer handling

3. Support AS robot language programming and adapt to semiconductor production line processes

4. Equipped with teaching pendant, local debugging, viewing of running and fault codes

5. Built in collision detection logic to protect the wafer from damage

6. Ethernet and IO interface, docking with the entire PLC to achieve automatic operation

7. Fault record storage for easy troubleshooting of production lines

8. Cabinet rack installation, easy disassembly and replacement

9. Safety emergency stop and interlock circuit, meeting semiconductor equipment safety standards

10. Support continuous operation of dust-free workshops 24/7

Product Parameters:

1. Drive object: Kawasaki EFEM wafer handling robot arm

2. Programming method: AS robot language

3. Interface: Digital IO, Ethernet communication, teaching pendant interface

4. Protection: collision detection, emergency stop, position deviation, overload protection

5. Operating environment: Semiconductor dust-free equipment cabinet

Kawasaki 1000-760-01 is used for motion control of EFEM front-end module wafer robots.

Product imag

ontroller Module

1C31194G02 Analog input module
5X00226G02 Analog input module
5X00481G01 analog output module

Other website links

UFC765AE102 3BHE003604R0102 嵌入式智能通讯板
A-B 2711P-B6C20D 工业触摸屏
COMMANDER 310 过程控制器