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Kawasaki 1000-760-01 Semiconductor Robot Controller

Introduction

Yaskawa ERCR-NS00-A210-E (NXC100) semiconductor robot controller, clean wafer manipulator servo control cabinet.

Product Features:

1. Provide fully digital servo drive specifically for Yaskawa clean robots

2. Optimization of motion trajectory to ensure high-precision positioning of wafer handling

3. Built in collision detection, interference instant shutdown protection for wafers

4. Support teaching pendant debugging, view parameters and fault codes

5. Support robot programming languages to quickly edit and transport processes

6. Ethernet and IO interface docking with the entire PLC system

7. Fault log storage for easy troubleshooting of production lines

8. Cabinet style structure, easy to disassemble, replace and maintain

9. Multiple safety circuits to meet semiconductor equipment safety standards

10. Support continuous operation of dust-free workshops 24/7

Product Parameters:

1. Drive object: Yaskawa Clean Six Axis Wafer Handling Robot

2. Operation: Equipped with handheld teaching pendant

3. Interface: Digital IO, Ethernet communication interface

4. Protection: collision detection, emergency stop, overload, position deviation protection

5. Working environment: Semiconductor equipment cabinet

Yaskawa ERCR-NS00-A210-E is used for motion control of wafer robotic arms in EFEM workstations.

Product imag

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ontroller Module

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