AMAT Applied Materials 0100-09123 Wafer Sensor

AMAT Applied Materials 0100-09123 Wafer Sensor

Product Details Introduction

Product Overview

AMAT 0100-09123 wafer sensor is a key sensing module used in semiconductor equipment for monitoring and detecting wafer status. It can collect real-time wafer position, presence status, temperature or other process related parameters, transmit signals to the equipment control system, and achieve automated operation and precise process control.

Product Features

High precision wafer inspection

Support wafer position, presence and absence detection to ensure wafer handling and processing accuracy.

High resolution and high repeatability, suitable for micron level process requirements.

Rapid response capability

The sensor responds quickly and is suitable for high-speed handling and automated process flow.

Real time feedback of status to the controller, supporting closed-loop control.

Multiple signal output interfaces

Supports digital signal (on/off) or analog signal output.

Compatible with AMAT main controller, I/O module, and data acquisition system.

Reliability and Industrial Design

Industrial grade sensor components, suitable for semiconductor equipment cleanrooms, vacuum and high temperature environments.

High lifespan components ensure long-term stable operation.

Security protection function

Built in anti-static, overvoltage and overcurrent protection to prevent equipment or sensors from being damaged by abnormal working conditions.

Support abnormal state alarm output to improve device security.

Modularity and easy maintenance

Standardized interface and size design for easy installation, disassembly, and replacement.

It can be seamlessly integrated with other modules of semiconductor automation equipment.

AMAT Applied Materials 0100-09123 Product imag

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