AMAT Applied Materials 0100-90642 plasma arc current plate

AMAT Applied Materials  0100-90642 plasma arc current plate

Product Details Introduction

1、 Product Overview

AMAT Applied Materials 0100-90642 plasma arc current plate is a critical electronic module used in semiconductor equipment RF or plasma process systems. It is mainly used for real-time monitoring of the current parameters of plasma arc, and feeds back the collected current signal to the controller to achieve precise closed-loop control, ensuring process stability and equipment safety.

2、 Technical parameters (speculated and organized)

Component type: Current Monitoring Board

Functional positioning: Plasma arc current detection and feedback

Measurement range: Suitable for typical currents in RF/plasma systems (specific values depend on the equipment)

Output signal: Analog or digital signal feedback to the main control system

Interface type: onboard interface or wire harness connection

Installation method: Modular design, can be installed near the control chassis or power module

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanroom environment and high electromagnetic interference conditions

Protection function: equipped with overcurrent, short circuit, and signal filtering protection

Version revision: There may be different versions (Rev A/B, etc.) with differences in measurement accuracy or interfaces

3、 Application scenarios

Plasma process monitoring: Real time monitoring of plasma arc current to achieve closed-loop control

RF system protection: Provides abnormal current alarm to prevent equipment overload or damage

Process consistency guarantee: Ensure plasma stability during etching, deposition, or cleaning processes

Data collection: Provide real-time current data to the controller for process optimization and recording

AMAT Applied Materials 0100-90642 Product imag

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