AMAT Applied Materials 0100-00046 Current Sensing Components
Product Details Introduction
1、 Product Overview
AMAT Applied Materials 0100-00046 current sensing component is a key module used in semiconductor process equipment power supply and control systems, for real-time monitoring of current signals and feedback to control units. This component can detect the current status of RF power supply, vacuum pump, actuator or other critical subsystems, thereby achieving closed-loop control, fault protection and process parameter monitoring.
2、 Technical parameters (speculated and organized)
Functional positioning: Current detection and signal feedback
Measurement range: can cover typical power current in the equipment (specific values vary depending on the model)
Output signal: Analog voltage signal or digital signal feedback to the main control system
Interface form: onboard interface or connection harness output to controller
Protection function: equipped with overcurrent and short circuit detection functions to ensure equipment safety
Installation method: Modular design, can be installed near the chassis, control chassis or power module
Environmental adaptability: Industrial grade design, suitable for high temperature, clean room, and electromagnetic interference environments of semiconductor equipment
Version revision: There may be different versions (such as Rev A/B) with slight differences in measurement accuracy or interface methods
3、 Application scenarios
RF power monitoring: detecting RF matching devices, power output, or load current to achieve closed-loop regulation
Vacuum/pump system: monitoring vacuum pump current, protecting equipment, and determining working status
Liquid/gas supply system: used for monitoring the driving current of pumps and valves, and assisting in the safe operation of processes
Process monitoring and protection: Provide real-time current data to the main control system for alarm, shutdown, or optimized control
4、 Product advantages
Real time monitoring: fast and accurate current detection to improve the safety of process equipment operation
Complete protection function: can detect abnormal current, prevent equipment overload or damage
Modular design: easy to replace and maintain, reducing downtime
High reliability: Industrial grade devices and PCB design, suitable for semiconductor process environments
Strong compatibility: compatible with various AMAT machine power and control modules, easy to integrate
AMAT Applied Materials 0100-00046 Product imag

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