AMAT Applied Materials 0010-09198 Ampoule Assembly

AMAT Applied Materials 0010-09198 Ampoule Assembly

Product Details Introduction

1、 Product Overview

AMAT Applied Materials 0010-09198 Ampoule Assembly is a specialized component used in semiconductor manufacturing equipment, mainly responsible for the sealed storage, transportation, and release of special gases, chemicals, or reagents during the process. Its design aims to ensure the safe transfer of materials in a clean and controllable environment, while avoiding pollution and leakage.

2、 Technical parameters

Component type: Ampoule Assembly

Main function: Storage and controlled release of chemical gases or liquids

Typical materials: high-purity glass, stainless steel alloy, and corrosion-resistant seals

Sealing method: vacuum sealing/welding sealing

Installation method: Can be directly connected to AMAT process chamber or conveying pipeline

Compatibility: Supports multiple AMAT process platforms (such as PVD, CVD, ALD, etc.)

3、 Application scenarios

Semiconductor manufacturing: safe supply of precursor gases or liquids used in critical processes

Vacuum process system: providing pure chemical sources for processes in high vacuum environments

Research and development experiment: suitable for efficient utilization of a small amount of special chemical reagents

Consumable replacement: As a replaceable module, it is convenient and quick to install and disassemble

4、 Product advantages

High purity guarantee: Avoid particles, impurities, or external contaminants from entering the process chamber.

High safety: prevent the leakage of harmful chemicals and ensure the safety of personnel and the environment.

Reliable sealing: Maintain airtightness during long-term storage and use.

Modular design: supports quick replacement and reduces equipment downtime.

Adapt to multiple processes: meet the application of different gas/liquid sources in PVD, CVD, ALD and other processes.

AMAT Applied Materials 0010-09198  Product imag

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