AMAT Applied Materials 0100-91086 Plasma Arc Current Circuit Board

AMAT Applied Materials 0100-91086 Plasma Arc Current Circuit Board

Product Details Introduction

Product Overview

AMAT Applied Materials 0100-91086 Plasma Arc Current Circuit Board is a core control board specifically designed for plasma process modules in semiconductor manufacturing equipment. Its main function is to monitor and control the plasma arc current, achieving precise management of the plasma process. By real-time collection and adjustment of current, this circuit board ensures stability and repeatability during processes such as etching and deposition, and is an important component for ensuring high-precision machining of equipment.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product type: Plasma arc current control circuit board

Main functions:

Real time acquisition of plasma arc current signals

Adjust the output current and control the stability of plasma arc

Collaborate with the process control system to achieve automated regulation

Interface type: Modular connector, can be used in conjunction with other control boards or servers in the AMAT system

Electrical characteristics:

Support high-precision current measurement

Strong anti-interference ability and adaptability to industrial environments

Low power consumption, high reliability design

Mechanical characteristics: Standard PCB module size for easy insertion into backplates or control racks

Application scenarios

Semiconductor plasma process control: used for regulating plasma arc current in equipment such as etching machines and PVD/CVD.

Stable process parameters: Ensure current stability, improve process consistency and product yield.

Equipment safety protection: By real-time monitoring of current, process or equipment damage caused by abnormal current can be avoided.

System integration: Collaborate with AMAT backboards, matrix boards, and control servers to achieve overall automation control.

AMAT Applied Materials 0100-91086 Product imag

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