AMAT Applied Materials 0190-08680 Scanner
Product Details Introduction
AMAT 0190-08680 Scanner
Product Overview
The AMAT 0190-08680 scanner is a component used in Applied Materials semiconductor equipment for precision position detection and optical/laser measurement. It is usually used for positioning, aligning, and scanning process areas of wafers or process carriers. It collects high-precision position information through optical or laser sensing technology and feeds the data back to the controller or I/O module to achieve high-precision automated process operations. This module is an important component to ensure the processing accuracy and repeatability of semiconductor equipment.
Technical parameters (inferred general characteristics)
Type: Optical/Laser Scanner Module
Function: Position detection, alignment, scanning measurement
Accuracy: Micron level positioning accuracy (according to specific process requirements)
Interface: Digital/analog signal output, can be connected to controllers or I/O modules
Control mode: linked with the driver module and controller to achieve closed-loop control
Structural features: Compact module, suitable for installation in clean room environments
Environmental adaptability: corrosion-resistant, low particle emissions, meeting the cleanliness requirements of semiconductor manufacturing
Application scenarios
Wafer or process carrier positioning
Accurately measure the position of the workpiece to ensure high precision in processes such as photolithography, etching, and thin film deposition
Automated process control
Provide position feedback, in conjunction with driver and cylinder modules, to achieve automated handling and alignment
Process monitoring and data collection
Scan and measure the process area, collect precision data for process optimization and quality control
Equipment maintenance and calibration
Provide fast calibration and fault detection functions to ensure long-term stable operation of equipment
AMAT Applied Materials 0190-08680 Product imag

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