AMAT Applied Materials 0100-01222 Controller Module

AMAT Applied Materials 0100-01222 Controller Module

Product Details Introduction

Product Overview

The AMAT 0100-01222 controller module is a control circuit board component used in semiconductor manufacturing equipment. This module is commonly used in Reflexion CMP chemical mechanical polishing systems, mainly serving as a Head Pneumatic Controller Board to control and distribute multiple gas or vacuum interfaces.

Technical parameters (based on industry information and naming inference)

Module type: Controller Module/PCB Assembly

Control channel: 4-channel (4-port configuration, used for multi-channel pneumatic interface control)

Main functions:

Drive and manage pneumatic actuators or valves

Responsible for pressure control and switching of pneumatic head in CMP process

Application System: AMAT Reflexion Series CMP Process Equipment

Installation form: PCB board inside the cabinet, with standard electrical interfaces

Application scenarios

CMP process control

Used for distributing air pressure in polishing heads to maintain stability and uniformity during the polishing process.

Pneumatic Control

Control multi-channel gas paths to achieve process gas or vacuum switching.

Semiconductor equipment maintenance and spare parts

As an AMAT original spare part, used for system maintenance and replacement.

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