AMAT Applied Materials E-710K126X Digital Controller

AMAT Applied Materials E-710K126X Digital Controller

Product Details Introduction

Product Overview

The AMAT E-710K126X digital controller is the core control module in Applied Materials semiconductor equipment, used to manage and regulate the operating status of various subsystems of the equipment. This controller achieves precise process control, equipment coordination, and status monitoring through digital signal processing, and is a key component to ensure the accuracy, stability, and safety of semiconductor processes.

Technical parameters (inference and industry norms)

Type: Digital Controller

Control method: Closed loop control based on digital signal processing (DSP)

Interface type: Multi channel input/output interface, supporting analog signals, digital signals, and communication bus

Applicable modules: heaters, RF matching components, sensors, actuators, etc

Data processing capability: high-speed real-time processing of signals and feedback, achieving precise control of process parameters

Reliability design: resistant to electromagnetic interference, high temperature, vibration environment, suitable for clean room operation

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment

Application scenarios

Process precision control

Control heaters, RF modules, gas flow rates, valves, etc. to achieve high-precision process conditions.

Subsystem coordination

Coordinate the operation of various modules within the equipment to ensure the synchronization and efficiency of the production line.

Status monitoring and alarm

Real time collection of subsystem parameters, triggering alarms or protection logic in case of abnormalities to ensure equipment safety.

Data recording and tracing

Collect and store process data to provide a basis for production quality traceability and optimization.

Product advantages

Digital control: precise control of equipment subsystems to improve process repeatability and stability.

Strong real-time capability: Quickly respond to changes in process and equipment status, reducing the impact of fluctuations on product quality.

High reliability: resistant to high temperatures, vibrations, and interference, suitable for semiconductor production environments.

Modular design: easy to maintain, upgrade, and replace, improving equipment availability.

Wide compatibility: Supports multiple AMAT device platforms and module interfaces, flexibly adapting to different process requirements.

AMAT Applied Materials E-710K126X Digital Controller Product imag

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