AMAT 0050-37127 Valve Stem

AMAT  0050-37127 Valve Stem

Product Details Introduction

AMAT 0050-37127 Valve Stem

Product Overview

AMAT (Applied Materials) 0050-37127 valve stem is one of the key mechanical components of gas delivery and vacuum control systems in semiconductor process equipment. It is usually used as the core actuator of valve components, playing a role in valve opening and closing, sealing, and flow regulation. Its quality and accuracy directly affect the stability of gas control and the uniformity of the process.

Technical parameters (typical direction, specific data should refer to the original factory information)

Material: High strength stainless steel or alloy material, with corrosion resistance and high vacuum adaptability

Surface treatment: precision machining and smoothness treatment to reduce friction and particle generation

Applicable environment: high vacuum, ultra clean room process environment

Accuracy: High coaxiality and wear resistance, ensuring the repeatability of valve opening and closing

Compatibility: Compatible with various AMAT process gas control valves

Application scenarios

Semiconductor gas delivery system

Installed in gas valves, it is used to control the transportation of high-purity process gases such as nitrogen, argon, fluoride, silane, etc.

Ensure stable flow and consistent reaction atmosphere.

Vacuum chamber control

Used for vacuum valves to switch the opening and closing of the chamber during vacuum pumping and inflation processes.

Ensure the rapid stability of the cavity environment.

Deposition process (CVD/PVD/ALD)

Control the supply of gas reaction source through valve opening and closing to ensure the uniformity of film deposition and film quality.

etching process

Regulate the flow rate of reactive gases to ensure etching rate and morphology control.

Ion implantation and cleaning process

Control the stable supply of auxiliary gases (such as nitrogen and oxygen) inside the control chamber.

Equipment maintenance and replacement

As one of the vulnerable parts, the equipment needs to be replaced regularly during long-term operation to maintain the accuracy of gas control.

AMAT  0050-37127 Valve Stem  Product imag

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