AMAT Applied Materials 0190-09272 directional coupler
Product Details Introduction
1、 Core Performance Characteristics
Accurate power coupling and monitoring capability
As a key component of RF/microwave circuits, this coupler can accurately extract the forward/reflected power components of the main transmission line, and together with the detector, form a reflectometer to achieve real-time monitoring of the matching status between RF source output power and load in semiconductor equipment, ensuring process stability. The coupling coefficient (input power to coupling port power ratio) and directionality (coupling/isolation power ratio) indicators have been optimized to effectively distinguish the direction of signal transmission and reduce measurement errors.
Low loss and high isolation design
Adopting a dedicated RF structure design, the insertion loss (main path power loss) is controlled at an extremely low level to ensure efficient transmission of most signal energy to the load end; Simultaneously possessing high isolation and DC isolation characteristics, it can block signal leakage and DC interference between input and isolation terminals, avoiding the influence of stray signals on sensitive circuits in semiconductor processes.
Broadband adaptation and environmental tolerance
Adapt to the commonly used RF frequency band of semiconductor equipment (referring to the coverage range of 0.6-6GHz of similar industrial grade couplers), with excellent frequency flatness and small amplitude response changes within the working bandwidth, meeting the signal coupling requirements in multiple process scenarios. The product can withstand industrial grade temperature and humidity environments (estimated to be -20~+70 ℃, 5% -95% humidity) and is suitable for the harsh operating conditions of semiconductor cleanrooms.
2、 Structure and application characteristics
Compact structure and device compatibility
Adopting a miniaturized design and lightweight volume (approximately 0.4kg compared to similar products), it can be embedded into compact RF links of semiconductor devices without occupying too much installation space. Equipped with standardized RF connectors (presumably SMA or N-type interfaces), seamlessly compatible with the RF system of AMAT semiconductor manufacturing equipment, simplifying the integration process.
High power carrying capacity and reliability
Optimize power carrying capacity for industrial scenarios (referring to similar products with a rated power of 200W), able to withstand long-term impact of continuous wave (CW) or pulsed RF signals, without any risk of performance attenuation or physical damage. The product comes with a one-year warranty period and has undergone strict factory testing to meet the continuous operation requirements of semiconductor equipment for 7 × 24 hours.
AMAT Applied Materials 0190-09272 Product imag

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