AMAT 0190-38030 Vacuum Dry Pump

AMAT 0190-38030 Vacuum Dry Pump 

 Introduction

AMAT 0190-38030 is a specialized vacuum dry pump for semiconductor equipment, with oil-free pumping. As a front-end vacuum acquisition unit for process machines, it is suitable for harsh semiconductor process conditions.

Product Features:

1. Oil free dry structure, no oil vapor reflux, avoiding chamber and wafer contamination

2. Corrosion resistant process gas, suitable for exhaust gas generated by etching and deposition

3. Built in fault monitoring, over temperature, overload, air leakage alarm, and operation status feedback

4. Original factory communication interface, which can be linked to the machine's main control for start stop operation

5. Modular structure, easy disassembly and maintenance, reducing operation and maintenance costs

Product Parameters:

1. Extraction method: dry oil-free

2. Extreme vacuum: ≤ 1Pa

3. Cooling method: air cooling

4. Power supply: 3 Phase 208-230V 50/60Hz

5. Communication: Device specific bus

Application fields:

1. AMAT etching equipment pre stage vacuum pumping

2. Vacuum acquisition of thin film deposition process equipment

3. Load lock chamber rough extraction operation

4. Vacuum unit for semiconductor wafer process equipment

5. Replacement of spare parts for semiconductor original equipment

AMAT 0190-38030 can provide clean and stable front-end vacuum output for semiconductor process machines.

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