Nikon 4S082-666-2 Robot Controller

Nikon 4S082-666-2 Robot Controller 

 Introduction

Nikon 4S082-666-2 is a wafer handling robot controller that is compatible with Nikon NSR lithography equipment and controls the robotic arm to complete precision wafer transfer operations.

Product Features:

1. Multi axis synchronous motion control, smooth wafer handling trajectory, fast positioning response

2. Built in collision protection mechanism, effectively avoiding wafer collision and damage

3. Native compatibility with Nikon lithography machine protocol, can directly interface with the host system

4. Self diagnosis of fault codes for easy and quick troubleshooting of mechanical arm abnormalities

5. Anti clean workshop electromagnetic interference, stable long-term continuous operation

Product Parameters:

1. Number of control axes: 4 axes

2. Communication interface: Device specific bus

3. Working power supply: DC24V

4. Working temperature: 5-42 ℃

5. Repetitive positioning accuracy: ± 0.04mm

Application fields:

1. Nikon NSR lithography machine wafer manipulator control

2. Internal wafer loading and unloading transport in lithography equipment

3. Motion drive for wafer pre alignment station

4. Automation unit of semiconductor exposure machine

5. Replacement of original spare parts for lithography equipment

The Nikon 4S082-666-2 can meet the high-precision and highly reliable wafer handling control requirements inside lithography equipment.

Product imag

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