Kawasaki 3NT520B-A044 wafer handling and transfer robot

Kawasaki 3NT520B-A044 wafer handling and transfer robot 

 Introduction

Kawasaki 3NT520B-A044 wafer handling and transfer robot, EFEM cleanroom dual arm wafer transfer manipulator.

Product Features:

1. Dual arm structure, capable of alternately grasping wafers, fast handling rhythm

2. ISO1 cleanroom design, low dust emission, avoiding wafer contamination

3. No need to move the track, can dock multiple FOUP wafer boxes

4. High precision in repeated positioning, preventing wafer collision and scratches during transportation

5. Built in collision detection, quick shutdown in case of interference to protect the wafer

6. Smooth and low vibration operation, suitable for 300mm wafer handling

7. Support SEMI standards and adapt to semiconductor whole machine control systems

8. Support remote communication docking with PLC to achieve fully automated production line operations

9. Compact body, saving EFEM internal installation space

10. Support 7 × 24-hour continuous production line operation

Product Parameters:

1. Structure: Horizontal multi joint dual arm robotic arm

2. Cleanliness level: ISO Class1

3. Control: Equipped with Kawasaki robot controller and Ethernet communication

4. Protection: collision detection, emergency stop, position over limit protection

5. Adaptation: 300mm wafer, semiconductor EFEM front-end module

Kawasaki 3NT520B-A044 is mainly used for wafer handling and transfer in semiconductor equipment EFEM stations

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