CTI Kryogenics 8185071G001R Low Temperature Pump

CTI Kryogenics 8185071G001R Low Temperature Pump 

 Introduction

CTI Cryogenics 8185071G001R Low Temperature Pump, Semiconductor High Vacuum On Board IS-8F Low Temperature Vacuum Pump.

Product Features:

1. Low temperature condensation adsorption extraction to obtain a clean, oil-free, and high vacuum environment

2. Built in intelligent control unit, supporting automatic regeneration process

3. High pumping speed design, excellent pumping ability for water vapor, argon gas, and nitrogen gas

4. Dual stage cold array structure, balancing the ability to extract condensable gases and hydrogen gas

5. Integrated temperature sensor, real-time monitoring of primary and secondary cold array temperature

6. Equipped with regeneration heating components, it can complete the degassing and regeneration operation of the pump body

7. Support communication and monitoring between local panels and remote PLCs

8. Low overall vibration, suitable for coating and etching semiconductor process chambers

9. Complete fault diagnosis, abnormal temperature and helium pressure output alarm signals

10. Integrated valve group integration reduces the workload of on-site pipeline installation

Product Parameters:

1. Pump type: On Board IS-8F integrated low-temperature pump

2. Working cold array temperature: Level 1~80K, Level 2~10-20K

3. Communication interface: RS-232, supports remote regeneration control

4. Protection: Cold array overheating, abnormal helium pressure, regeneration fault protection

5. Adaptation conditions: PVD coating, semiconductor process high vacuum chamber

CTI Cryogenics 8185071G001R is mainly used in high vacuum acquisition stations for thin film deposition and etching equipment

Product imag

ontroller Module

HYBRICON PCI354-1022-38 02088-019 module
PM01 PM01-A-V001 Digital output module
PPC380AE02 HIEE300885R0102 controller card

Other website links

Woodward 9907-018 2301A 控制器模块
IC755CSW07CDA 触摸面板
BENTLY 3500/42M 176449-02 振动监测模块