AMAT 0190-05624 RF Generator

AMAT 0190-05624 RF Generator 

 Introduction

AMAT 0190-05624 RF generator, compatible with Endura2 semiconductor equipment plasma RF power supply.

Product Features:

1. All solid state RF power output, power closed-loop control for stable output

2. It can withstand high reflection power and is not easy to shut down due to sudden changes in plasma ignition load

3. Built in arc detection circuit, quickly identify and suppress chamber ignition

4. Excellent harmonic suppression, reducing the interference of clutter on the process results

5. Support pulse power mode to meet special plasma process requirements

6. Real time collection of forward and reflected power, process data can be monitored and uploaded

7. Complete fault diagnosis, output alarm signals for faults such as over temperature and over standing wave

8. Compatible with AMAT device backplane communication and integrated with the overall control system

9. Rack mounted modular structure, easy disassembly, replacement, and maintenance

10. Supports 7 × 24-hour continuous operation and is compatible with wafer production lines

Product Parameters:

1. Operating frequency: 13.56MHz

2. Output power: The power is continuously adjustable and suitable for cavity plasma technology

3. Communication interface: Device specific backplane digital communication interface

4. Protection function: Over temperature, over standing wave, arc, overcurrent interlock protection

5. Compatible equipment: AMAT Endura2 process platform

AMAT 0190-05624 is mainly used in plasma process stations for thin film deposition and metal etching.

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