AMAT Applied Materials 0100-09307 Relay Module

AMAT Applied Materials 0100-09307 Relay Module

Product Details Introduction

AMAT 0100-09307 Relay Module

Product Overview

AMAT 0100-09307 is a relay/interlock circuit board module in Applied Materials semiconductor equipment, mainly used for safety control and circuit switching. It achieves electrical control and protection of equipment subsystems by integrating relays and interlock logic circuits.

Technical characteristics (inferred general features)

Function type: Relay driven+Interlock logic

Application objects: power supply, vacuum pump, gas valve, fan, electromagnetic actuator and other subsystems

Control form: Supports switching between normally open/normally closed contacts

Security attribute: equipped with interlocking function to prevent accidental operation under unsafe conditions

Electrical performance: Designed to meet the high reliability, long lifespan, and low interference requirements of semiconductor equipment

Application scenarios

Semiconductor manufacturing equipment

Used for etching machines CVD、PVD、 Electrical control circuits for process equipment such as cleaning machines

Ensure safe switching of subsystems such as process gas, vacuum, and RF power supply

Interlocking and Security Protection

Implement interlocking logic for equipment door locks, chamber covers, gas panels, etc

Automatically cut off power in abnormal or dangerous conditions to protect personnel and equipment safety

Power supply and actuator control

Control the start and stop of peripheral devices such as vacuum pumps, cooling systems, gas valves, fans, etc

As a logical permission signal module, ensure the correct sequence of actions

Equipment diagnosis and maintenance

Assist engineers in diagnosing the health status of circuits through relay status feedback

In preventive maintenance, as a replaceable unit, quickly restore equipment operation

AMAT Applied Materials 0100-09307 Product imag

AMAT Applied Materials 0100-09307 Related website links

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Other website links

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