AMAT Applied Materials 0010-70321 slit valve

AMAT Applied Materials 0010-70321 slit valve

Product Details Introduction

Product Overview

AMAT 0010-70321 is a slit valve in Applied Materials semiconductor equipment.

In semiconductor process equipment such as PVD, CVD, Etch, etc. vacuum chambers, slit valves are key components used to isolate or connect vacuum chambers and transfer chambers, typically used in wafer loading and transfer processes.

Technical parameters (typical characteristics, inferred from AMAT valve series)

Type: Slit Valve Assembly.

Function:

Form a switchable isolation barrier between the transmission chamber and the process chamber.

Provide wafer passage when opening the valve and maintain vacuum sealing when closing the valve.

Drive mode: commonly used is pneumatic drive (compressed air control piston or cylinder).

Sealing method: O-ring or specialized seal to ensure vacuum sealing.

Material: The valve body is mostly made of aluminum alloy or stainless steel, and the sealing element is made of polymer corrosion-resistant material.

Features: Supports high-frequency switching, resistant to plasma corrosion, and has a long lifespan.

Application scenarios

Vacuum chamber isolation

Switch between the wafer transfer chamber and the deposition chamber, etching chamber, and detection chamber to ensure independent process environments for different chambers.

Wafer transfer

Provide a vacuum channel during valve opening for the vacuum robotic arm to load or remove wafers from the process chamber.

Process stability control

Keep the valve closed during the process to ensure stable vacuum pressure and atmosphere inside the chamber.

safety protection

The valve interlocking system ensures that the valve will not open incorrectly when safety conditions are not met, preventing chamber pressure loss or wafer damage.

Product advantages

High vacuum sealing: Ensure isolation between chambers to avoid gas cross contamination.

High durability: Suitable for millions of switch cycles, meeting the needs of large-scale production.

Corrosion resistance of materials: able to withstand plasma and corrosive process gas environments.

Easy maintenance: Modular design of valve components, allowing for quick replacement of seals or the entire valve.

AMAT Applied Materials 0010-70321 Product imag

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