AMAT Applied Materials 0010-76086 Water Valve Components

AMAT Applied Materials 0010-76086 Water Valve Components

Product Details Introduction

Product Overview

AMAT 0010-76086 is a water valve assembly in semiconductor equipment, used for precision liquid control systems, responsible for liquid distribution, switching, and flow regulation, ensuring equipment cooling and process liquid management.

Technical Features

Multi channel design: supports liquid distribution and switching across multiple channels, adapting to complex fluid systems.

High purity material: Made of high-purity stainless steel and other materials, compatible with semiconductor process environment, avoiding pollution.

Precision control: Accurately adjust liquid flow and pressure through valves.

Compact structure: Designed to be compact and easy to install in devices with limited space.

Application field

Chemical Vapor Deposition (CVD) System

Control the cooling and liquid flow path of the reaction chamber.

Physical Vapor Deposition (PVD) System

Manage the temperature and liquid flow rate of the target material and reaction chamber.

Chemical Mechanical Polishing (CMP) System

Distribute polishing solution and maintain stable cooling system.

Etch system

Cool the etching chamber to ensure precise flow of process liquid.

Precautions

Compatibility: Ensure that the interface and specifications match the existing devices.

Maintenance and Cleaning: Regularly inspect and clean valve components to prevent impurities from clogging.

Performance monitoring: Monitor liquid flow and pressure, and promptly identify any abnormalities.

Installation direction: Confirm that the valve components are installed in the correct direction to ensure that the liquid flow direction meets the design requirements.

AMAT Applied Materials 0010-76086 Water Valve Components Product imag

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