AMAT Applied Materials 0041-10824 Heater

AMAT Applied Materials 0041-10824 Heater

Product Details Introduction

Product Overview

AMAT 0041-10824 heater is a key heating module in Applied Materials semiconductor process equipment, mainly used to control the temperature of process chambers or process boards. This heater plays a core role in semiconductor manufacturing processes such as deposition, etching, and ion implantation, ensuring the stability and uniformity of process temperature through precise heat transfer, thereby improving product yield and process consistency.

Technical parameters (typical features)

Type: Heater/Heater Module

Function: Provides stable and controllable heat for heating process chambers or process boards

Power range: Designed according to process requirements (usually tens to hundreds of watts)

Control method: Cooperate with digital controller or temperature control module to achieve closed-loop temperature control

Interface form: Standard electrical interface, used in conjunction with the control system and heater base plate

Work environment: cleanroom compatible, high temperature resistant, chemical resistant

Compatible devices: Applied Materials CVD, PVD, Etch, Ion Implant and other semiconductor devices

Application scenarios

Process chamber heating

Provide a stable temperature environment to ensure the accuracy of thin film deposition, etching, or ion implantation processes.

Process board/wafer heating

Uniform heating of wafers or process boards to improve process consistency and yield.

Temperature closed-loop control

Cooperate with digital controllers or temperature control modules to adjust heating power in real-time and achieve precise temperature control.

Equipment maintenance and replacement

Modular design facilitates quick disassembly and assembly, improving equipment maintenance efficiency.

AMAT Applied Materials 0041-10824 Heater Product imag

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