AMAT Applied Materials 0040-20100-01 Heater Base Plate

AMAT Applied Materials 0040-20100-01 Heater Base Plate

Product Details Introduction

Product Overview

The AMAT 0040-2010000-01 heater base plate is a key support and heat dissipation component in Applied Materials semiconductor process equipment. It is commonly used for the installation and fixation of heater modules, while providing stable heat conduction and electrical isolation. The bottom plate ensures that the heater can safely and uniformly transfer heat in the process chamber or related devices, thereby ensuring the temperature accuracy and consistency of deposition, etching, or diffusion processes.

Technical parameters (inference and industry norms)

Type: Heater Base Plate/Mounting Plate

Function: Mechanical support, thermal conduction, electronic isolation

Material: High temperature corrosion-resistant metal or ceramic composite material

Size and Installation: Designed according to the device model, compatible with specific heater modules

Temperature resistance performance: able to withstand the working temperature range of the heater, ensuring stability

Working environment: semiconductor clean room, resistant to vacuum or low pressure environment

Compatible devices: Applied Materials multi class deposition, etching, or heat treatment equipment

Application scenarios

Heater module support

Fix the heater component to ensure its stable position in the process chamber.

Heat conduction and homogenization

Realize uniform heat distribution through the bottom plate, reduce local overheating or cold spots, and improve process consistency.

Electrical isolation and safety

Isolate the electrical components of the heater to ensure equipment and wafer safety.

Equipment maintenance and replacement

Easy to disassemble and assemble heater modules, improve maintenance efficiency, and reduce downtime.

AMAT Applied Materials 0040-20100-01 Heater Base Plate Product imag

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